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ITRC Collaborates with King Lai Group, National Formosa University and
National Central University to Upgrade in Domestic Vacuum Industry

Instrument Technology Research Center (ITRC) of National Applied Research Laboratories (NARLabs) in collaboration with King Lai Group (domestic manufacturer for components and equipment in vacuum systems), National Formosa University (NFU) and National Central University (NCU) have acquired the grant from the Ministry of Science and Technology to develop the "Particle Inspection System for High Standard Cleanliness Vacuum Gate Valves". The collaboration project expects to promote upgrades in self-supplying capabilities and competitiveness of domestic suppliers for industrial equipment as well as key components.

Vacuum technology is widely applied in food, machinery, and high-tech industries since items of vacuum equipment are necessary for manufacture. The average annual expenditure for manufacturing equipment in semiconductor industry reaches billions of US dollars, which indicates vacuum technology plays a crucial role in semiconductor business. High efficiency and stability of vacuum equipment have direct impact on product quality and yield, therefore quality control for high standard cleanliness of vacuum applied materials should meet the increasingly strict requirements.

Among items of vacuum equipment, the "gate valve" is one of the most important component. During the valve in operation, the generated particles have direct influence on vacuum cleanliness. Domestic semiconductor industry have requested all domestic and foreign equipment suppliers must provide particle pollution assessments along with their products. In response to the requests from the industry, King Lai has been actively seeking the assistance from ITRC and collaboration with National Formosa University and National Central University in the research of "Particle Inspection System for High Standard Cleanliness Vacuum Gate Valves".

The inspection system is designed by Prof. Rong-Yuan Jou from Department of Mechanical Design Engineering of National Formosa University. The standard inspection procedures as well as the particle element analyses are established by ITRC's team and Prof. Sheng-Hui Chen from Department of Optics and Photonics of National Central University. The system mainly monitors and analyzes the composition of the sub-micron particles generated by the vacuum valve in operation and real-time inspection of various types of particles and pollution sources. Through this data collection and feedback model for product design, manufacturers could rapidly verify the product quality and adopt this data for future product improvements. In addition, ITRC with its own extensive experiences in establishment of certified standard laboratories and vacuum technology has assisted King Lai group in establishing the standardized procedures for characteristic measurement, analytical technology and related hardware facility inspection.

ITRC has been developing in the field of vacuum technology for more than 40 years and is one of Taiwan's most important vacuum technology research and development centers. In response to government science and technology development policies and mission to promote upgrades in industries, ITRC has actively devoted full efforts on self-supplying for instrumental equipment industry and key components. This cooperation combines research capacity from the industry, academia, and research institute, and adopting national-level advanced technologies to cultivate industrial capabilities in self-supplying equipment and independent research and development. In the future, integrating the equipment industry to drive key components development locally from upstream to downstream will eventually fulfill the goal of self-supplying capabilities of equipment industry and key components, and further enhance Taiwan's industrial competitiveness.

Photo of team members from left to right: Prof. Rong-Yuan Jou of NFU, Prof. Sheng-Hui Chen of NCU, Mr. Danniel Lee, Chairman of King Lai Group, Ming-Hua Shiao, Che-Chin Chen and James Su of ITRC.
Photo of team members from left to right: Prof. Rong-Yuan Jou of NFU, Prof. Sheng-Hui Chen of NCU, Mr. Danniel Lee, Chairman of King Lai Group, Ming-Hua Shiao, James Su and Che-Chin Chen of ITRC.

2017/2/14 updated