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Team Member

ALD Process and Equipment Development Division


0349.jpg Dr. Kei, Chi-Chung
Research Fellow / Deputy Division Director
Specialty:
    1. Preparation of organic and oxide nanowires by using vapor phase methods
    2. Preparation of oxide nano honeycombs by using solution-based nanosphere lithography
    3. Fabrication and characterization of gold and gold-silver nanoparticle array
    4. Design and process development of chemical beam epitaxy
    5. Design and process development of atomic layer deposition
TEL: 03-5779911 Ext. 585
Email: g893552 itrc.narl.org.tw

0411.jpg Dr. Lee, Chao-Te
Research Fellow
Specialty:
    1. Design sputtering system and improve the process
    2. Nanomaterial
    3. Magnetic film
TEL: 03-5779911 Ext. 643
Email: tigerlee itrc.narl.org.tw

0499.jpg Cho, Wen-Hao
Associate Researcher
Specialty:
    1. Optical Thin Film
    2. Atomic Layer Deposition
TEL: 03-5779911 Ext. 641
Email: kesikar itrc.narl.org.tw

0517.jpg Liou, Bo-Heng
Associate Researcher
Specialty:
    1. Magnetron sputtering
    2. Plasma enhand atom layer deposition
TEL: 03-5779911 Ext. 640
Email: jazerox itrc.narl.org.tw

0654.jpg Yu, Yu-Hsuan
Engineering Assistant
Specialty:
    1. Atomic layer deposition(ALD)
    2. Developing and assembling of semiconductor system
    3. Developing of chemical synthesis process
    4. Laboratory equipment operation
TEL: 03-5779911 Ext. 659
Email: ysyu narlabs.org.tw

0777.jpg Daniel Chen
Research Assistant
Specialty:
    1. Nanoscale biosensor process
    2. Semiconductor process intergration
    3. Atomic layer deposition process
TEL: 03-5779911 Ext. 614
Email: danielchen narlabs.org.tw

0788.jpg Panda Chen
Engineering Assistant
Specialty:
    1. Mechanism Design
TEL: 03-5779911 Ext. 421
Email: 1609788 narlabs.org.tw

2017/5/2 updated