Nanotechnology & Bio-medical
The development of nanotechnology & bio-medical technology at ITRC focuses on the surface science. To better understand the interactions between the material (majorly silicon based) surface condition and the applied chemical agents under different environmental conditions, ITRC has developed a variety of methods to modify the material surface, to examine the surface characteristic, and to probe the interaction phenomena. The surface patterns can be patterned in-house by LIGA-like process, electron beam lithography, deep dry etching, and focused ion beam method. The surface characteristics can be profiled by Scanning Probe Microscope (SPM) with various probe tip geometries, tip materials and detector mechanisms, and by the Scanning Electron Microscope (SEM).
Both SPM and SEM in ITRC are complied by ISO 17025 standard and are accredited by Taiwan Accreditation Foundation (TAF) granted as standard instruments to measure nano-scale distance. SPM can provide the standard measuring distance ranged from 100 nm to 10,0000 nm, and SEM ranged from 80 nm to 2,000 nm, respectively.
The applications can help to understand the liquid solution on the pattern surface motion behavior, the oil drops split from the emulsion solution, and the interaction between the photon and surface structure. They have potentials to be used in bio-sensor, drug separation and manufacturing, and in photonics fields. Another research topic is to open a new window for biologic tissues examination by constructing a tera-hertz time domain spectroscopy. This man-made frequency bandwidth radiation can penetrate live tissues without damaging them. This spectroscopy with femto-second laser will be another powerful tool for material characterization.
Lotus Effect Biochip System and Multifunctional Biochemical Biochip System developed by ITRC. The related patent earned the gold medal in 2007 Taipei International Invention Show & Technomart, the bronze medal in 2007 International Trade Fair Ideas-Inventions-New Products (IENA), and the gold medal of 2008 National Invention and Creation Awards.
Calibration laboratories of (a) SEM and (b) SPM in ITRC